Tetraethyl Orthosilicate - from Aerogel Silicon Sources to Electronic Special Gas Materials

Ethyl silicate is also known as tetraethyl silicate and tetraethoxysilane. Colorless transparent liquid with special odor. It is stable in the presence of anhydrous, decomposes into ethanol and silicic acid in case of water, becomes turbid in humid air, and dissolves in organic solvents such as alcohol and ether. Toxic and highly irritating to human eyes and respiratory tract. It is obtained by distillation after the action of silicon tetrachloride and anhydrous ethanol.

It is used to make heat-resistant and chemical-resistant coatings and organic silicon solvents. It can also be used in organic synthesis, basic raw materials for the preparation of advanced crystals, optical glass treatment agents, binders, and insulating materials in the electronics industry.

Ethyl orthosilicate (TEOS), also known as tetraethoxysilane, chemical formula Si(OC2H5)4, is a commonly used silicon source for the preparation of SiO2 aerogels, mainly used as electrical insulating materials, coatings, optical glass treatment agents; also It is used in organic synthesis to manufacture chemical-resistant coatings, heat-resistant coatings, silicone solvents and precision casting adhesives; used as heat-resistant coatings, chemical-resistant coatings, organic synthesis intermediates, etc.

In addition, electronic grade TEOS is widely used in chemical vapor deposition process to form silicon dioxide deposition film, so as to block contaminants and impurities from entering semiconductor elements, at the same time, it can produce conductive layer or insulating layer, produce anti-reflection film to improve light absorption, temporarily block Etching etc.